HEIDENHAIN Metis HP Stage
SAN FRANCISCO, Oct. 13, 2026 (GLOBE NEWSWIRE) — ETEL, the leadi g supplie of high-pe fo ma ce motio co t ol compo e ts a d complete motio platfo ms, is p oud to i t oduce the METIS HP, a ew full ai bea i g pla a platfo m desig ed fo the most dema di g step‑a d‑sca semico ducto applicatio s, i cludi g di ect lase w iti g a d high‑ esolutio optical i spectio systems. With this ew p oduct, ETEL fu the st e gthe s its positio as a leade i high-p ecisio motio co t ol by delive i g a solutio that combi es exceptio al speed a d stability, outsta di g dy amic st aight ess, a d p ojected tool‑poi t measu eme t capability.
“Buildi g o ETEL’s lo g‑sta di g expe tise i high‑p ecisio platfo ms, the METIS HP p ovides the t ajecto y quality equi ed fo adva ced optical p ocesses,” said Stépha e Pelleg i i, P oduct Ma age at ETEL. “Its ema kable speed stability a d dy amic st aight ess e su e co siste t pe fo ma ce eve at high sca i g velocities. Suppo ti g pa el sizes up to 600 mm × 600 mm, the METIS HP add esses the g owi g eed fo ext‑ge e atio maskless lithog aphy with la ge‑a ea subst ates.”
At the co e of the METIS HP is a multi‑deg ee‑of‑f eedom (mDoF) HEIDENHAIN e code , e su i g accu acy without the mal d ift. This a chitectu e e ables p ojected tool‑poi t measu eme t. ETEL co t olle s ca emulate a t a sisto -t a sisto logic (TTL) positio sig al fo use as a t igge eve t. This i ovative solutio is a ve y compelli g alte ative to the classical i te fe omete used as a adva ced t igge ge e ato . With the METIS HP, the e is o eed fo a mi o to be added o the ca iage, o ai le si g effect o ai pe tu batio , a d a lowe cost.
The METIS HP delive s outsta di g pe fo ma ce, i cludi g ±150 m accu acy ove the full XY st oke afte mappi g, ±150 m dy amic st aight ess at speeds up to 1 m/s, a d dy amic capabilities eachi g accele atio s up to 20 m/s². These capabilities mi imize tu a ou d time, the eby i c easi g machi e th oughput fo step-a d-sca applicatio s.
High-e d i spectio applicatio s fo adva ced packagi g equi e apid a d p ecise focal-dista ce adjustme ts. With its high-ba dwidth 4-DoF module p ovidi g fi e co t ol ove the Z, tip, tilt, a d theta axes, METIS HP is the optimal platfo m fo these dema di g i spectio tasks.
The METIS HP is ow available fo OEM i teg atio . Fo fu the i fo matio , visit ETEL’s website at https://www.etel.ch/co tact/. O visit ETEL at the HEIDENHAIN Booth 1639 du i g SEMICON West, taki g place Octobe 13-15, 2026, i Sa F a cisco.
Compa y Co tact:Da i Pizzo, Sales Ma age Pho e: (408) 332-3166 Email: dpizzo@heide hai .com
Media Co tact:Sa dy Fewkes, Bodewell G oupPho e: (408) 529-9685Email: SFewkes@Bodewellg oup.com
A photo accompa yi g this a ou ceme t is available at: https://www.globe ewswi e.com/NewsRoom/Attachme tNg/f271ee5d-7f87-464d-8357-29ce22bbbb01
